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Proceedings Paper

Design and FEM simulation: all-light-processing infrared image transducer
Author(s): Liuqiang Zhang; Gen Qing Yang
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Paper Abstract

The novel thermal image system described in this paper is an all-light-processing infrared image transducer based on micromachining technology. This system incorporates the function of infrared image conversion and image intensification together on the base of a light-modulating thermal image device (LMTID), a monolithically fabricated chip using CMOS compatible surface micromachining techniques. This system has a series of potential advantages: high sensitivity and definition, low volume and power expenditure as well as short response time and room temperature operating ability. The design and modeling of the device are presented. Theoretical calculations on the sensitivity, minimum detectable power, and response time are carried out using a simple beam theory, and the design is optimized for the sake of high sensitivity and low minimum detectable power. FEM simulation using ANSYS 5.4 program basically demonstrates the theoretical calculations, as a result of which a sensitivity of 0.03 m/W and a response time of 6 ms are obtained.

Paper Details

Date Published: 2 September 1999
PDF: 9 pages
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); doi: 10.1117/12.361272
Show Author Affiliations
Liuqiang Zhang, Shanghai Institute of Metallurgy (China)
Gen Qing Yang, Shanghai Institute of Metallurgy (China)

Published in SPIE Proceedings Vol. 3878:
Miniaturized Systems with Micro-Optics and MEMS
M. Edward Motamedi; Rolf Goering, Editor(s)

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