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Proceedings Paper

Through-wafer interrogation of microstructure motion for MEMS feedback control
Author(s): Jeremy M. Dawson; Jingdong Chen; Kolin S. Brown; Parviz F. Famouri; Lawrence Anthony Hornak
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Paper Abstract

Closed-loop MEMS control enables mechanical microsystems to adapt to the demands of the environment which they are actuating opening a new window of opportunity for future MEMS applications. Planar diffractive optical microsystems have the potential to enable the integrated optical interrogation of MEMS microstructure position fully decoupled from the means of mechanical actuation which is central to realization of feedback control. This paper presents the results of initial research evaluating through-wafer optical microsystems for MEMS integrated optical monitoring. Positional monitoring results obtained from a 1.3 micrometer wavelength through- wafer free-space optical probe of a lateral comb resonator fabricated using the Multi-User MEMS Process Service (MUMPS) are presented. Given the availability of positional information via probe signal feedback, a simulation of the application of nonlinear sliding control is presented illustrating position control of the lateral comb resonator structure.

Paper Details

Date Published: 2 September 1999
PDF: 12 pages
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); doi: 10.1117/12.361271
Show Author Affiliations
Jeremy M. Dawson, West Virginia Univ. (United States)
Jingdong Chen, West Virginia Univ. (United States)
Kolin S. Brown, West Virginia Univ. (United States)
Parviz F. Famouri, West Virginia Univ. (United States)
Lawrence Anthony Hornak, West Virginia Univ. (United States)

Published in SPIE Proceedings Vol. 3878:
Miniaturized Systems with Micro-Optics and MEMS
M. Edward Motamedi; Rolf Goering, Editor(s)

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