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Proceedings Paper

Miniature ultrasonic transducers with optical strain readout
Author(s): Chung-Hoon Lee; Amit Lal
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Paper Abstract

In this paper we demonstrate the use of diffractive gratings to optically measure strain in miniature ultrasonic transducers. Aluminum diffraction gratings were fabricated on silicon-microfabricated ultrasonic horns and beams which were actuated by bonded piezoelectric PZT (Lead-Zirconate Titanate) plates. A He-Ne laser beam was diffracted from the grating and a knife-edge was used to measure small changes in the diffraction angle as a result of time varying grating space and width. The measured strain and displacement profiles agreed with the expected mode patterns for the silicon resonators.

Paper Details

Date Published: 2 September 1999
PDF: 7 pages
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); doi: 10.1117/12.361266
Show Author Affiliations
Chung-Hoon Lee, Univ. of Wisconsin (United States)
Amit Lal, Univ. of Wisconsin (United States)


Published in SPIE Proceedings Vol. 3878:
Miniaturized Systems with Micro-Optics and MEMS
M. Edward Motamedi; Rolf Goering, Editor(s)

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