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Proceedings Paper

Micromirrors for direct writing systems and scanners
Author(s): Hubert K. Lakner; Wolfgang Doleschal; Peter Duerr; Andreas Gehner; Harald Schenk; Alexander Wolter; Guenter Zimmer
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Paper Abstract

Three different types of deformable mirror Spatial Light Modulators (SLMs) based on device concepts like Viscoelastic Control Layer (VCL), Cantilever Beam Mirror (CBM), and Moving Liquid Mirror (MLM) have been developed. All of them allow to create deformation profiles which act as phase gratings whose period is defined by the pitch of the pixel electrodes. The diffraction of the incident light is used to achieve spatial light modulation. The operation principles of the different types of SLMs are outlined in detail. All the mentioned SLMs can be manufactured on top of a high voltage CMOS circuitry. SLMs with up to 2 million pixels in analog operation mode have been realized up to now. The benefits of the different approaches with respect to fabrication aspects and respect to different applications will be addressed. For the angular deflection of light a new type of resonant microscanner mirror was developed. The device is based on a silicon micromechanical torsional actuator. The new approach for the configuration of the electrodes and the resulting driving principle allows to achieve large scanning angles (plus or minus 30 degree optically at atmospheric pressure) at low driving voltages (20 V max.) and low power consumption (less than 1 (mu) W). The operation principle of the new device enables the realization of 2D scanners as well.

Paper Details

Date Published: 2 September 1999
PDF: 11 pages
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); doi: 10.1117/12.361264
Show Author Affiliations
Hubert K. Lakner, Fraunhofer Institute of Microelectronic Circuits and Systems (Germany)
Wolfgang Doleschal, Fraunhofer Institute of Microelectronic Circuits and Systems (Germany)
Peter Duerr, Fraunhofer Institute of Microelectronic Circuits and Systems (Germany)
Andreas Gehner, Fraunhofer Institute of Microelectronic Circuits and Systems (Germany)
Harald Schenk, Fraunhofer Institute of Microelectronic Circuits and Systems (Germany)
Alexander Wolter, Fraunhofer Institute of Microelectronic Circuits and Systems (Germany)
Guenter Zimmer, Fraunhofer Institute of Microelectronic Circuits and Systems (Germany)


Published in SPIE Proceedings Vol. 3878:
Miniaturized Systems with Micro-Optics and MEMS
M. Edward Motamedi; Rolf Goering, Editor(s)

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