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Proceedings Paper

Magnetically driven surface-micromachined mirrors for optical applications
Author(s): Gwo-Bin Lee; Thomas Tsao
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Paper Abstract

A surface-micromachined plate-type actuator with two torsional support beams has been developed for optical applications. A silicon-nitride plate with an area of 1 X 1 mm2 is electroplated with a soft magnetic material (permalloy) and can be activated by an external magnetic field. In order to deflect the mirror to a very large angle, the geometry of the beams has been optimized using numerical simulation and theoretical analysis. Experimental data showed that the micro mirror is robust enough to be rotated up to 180 degrees over 10,000 times without any damage. The mirror is demonstrated as a laser beam deflector in this study. The deflection angle of the mirror can be controlled by the rotation of a permanent magnet. Data showed that this mirror could be rotated up to 90 degrees with a maximum frequency of 20 Hz. Details including design, fabrication, analysis, as well as operation, have been presented. Results showed that the device could be used as a scanning mirror for future application.

Paper Details

Date Published: 2 September 1999
PDF: 10 pages
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); doi: 10.1117/12.361252
Show Author Affiliations
Gwo-Bin Lee, National Cheng Kung Univ. (Taiwan)
Thomas Tsao, United Micromachines (United States)

Published in SPIE Proceedings Vol. 3878:
Miniaturized Systems with Micro-Optics and MEMS
M. Edward Motamedi; Rolf Goering, Editor(s)

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