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Proceedings Paper

Multidimensional calculation of coupled flow and electrodeposition in microscopic trenches
Author(s): Chunmei Xia; Jayathi Y. Murthy; Minking K. Chyu; Yao Cheng
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Paper Abstract

Numerical simulations have been done to delineate transport effects on the electrodeposition of heavy ions in the deep cavities typically fabricated by the LIGA process. Both forced convection and buoyancy-driven natural convection have been considered. Flow patterns and deposition rates have been calculated for a range of electrode reaction rates, forced flow Reynolds numbers, Rayleigh numbers and cavity aspect ratios. The results show that free convection is a significant player in the transport-limited regime, and substantially increases deposition rates, even for modest Rayleigh numbers. For high Rayleigh numbers, the flows are found to be unsteady, and may further increase deposition rates.

Paper Details

Date Published: 30 August 1999
PDF: 11 pages
Proc. SPIE 3874, Micromachining and Microfabrication Process Technology V, (30 August 1999); doi: 10.1117/12.361242
Show Author Affiliations
Chunmei Xia, Carnegie Mellon Univ. (United States)
Jayathi Y. Murthy, Carnegie Mellon Univ. (United States)
Minking K. Chyu, Carnegie Mellon Univ. (United States)
Yao Cheng, Synchrotron Radiation Research Ctr. (Taiwan)


Published in SPIE Proceedings Vol. 3874:
Micromachining and Microfabrication Process Technology V
James H. Smith; Jean Michel Karam, Editor(s)

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