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Proceedings Paper

Development behavior of irradiated foils and microstructures
Author(s): Pascal Meyer; Aida El-Kholi; Juergen Mohr; Clifford Cremers; Faycal Bouamrane; Stephan Megtert
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Paper Abstract

The LIGA process, which combines x-ray lithography with electroplating and modeling, is a world wide used technique for the fabrication of high aspect ratio microstructures. In the first step a resist layer, typically PMMA, which is applied to a metal coated substrate, is patterned by shadow printing through a x-ray mask with synchrotron radiation. The exposed parts are subsequently dissolved in an organic developer. The achievable quality of the microstructure is decisively defined by the development process. In order to define an effective development process and create a simulation tool, which allows to foretell the needed development parameters and the achievable quality already at a design stage, the development behavior and its influencing parameters need to be investigated. Much work has been done in this area. In these previous studies, the development rate was either studied using PMMA foils in which a homogeneous dose or a dose profile has been deposited, or using irradiated microstructures. In the first case, result obtained by ex-situ measurements show, that the development rate is a bare function of the dose. In case of irradiated microstructures, the experimentally obtained development rate was described as an empirical function of the dose value and depth of dose deposition. The aim of this work is to investigate the difference in the development behavior of a microstructure compared to a foil and to link the results. Therefore, using in-situ measurements, we have made experiments using foils and microstructures with crosslinked and non-crosslinked PMMA covering a wide dose range. The final purpose is to find a relation between dose and development rate to determine the necessary development time of a sample with a given dose profile, with high precision. Experiments, result and simulation of the development rate, for the two kinds of materials are presented and discussed.

Paper Details

Date Published: 30 August 1999
PDF: 9 pages
Proc. SPIE 3874, Micromachining and Microfabrication Process Technology V, (30 August 1999); doi: 10.1117/12.361235
Show Author Affiliations
Pascal Meyer, Forschungszentrum Karlsruhe GmbH (Germany)
Aida El-Kholi, Forschungszentrum Karlsruhe GmbH (Germany)
Juergen Mohr, Forschungszentrum Karlsruhe GmbH (Germany)
Clifford Cremers, LURE/Univ. de Paris-Sud (United States)
Faycal Bouamrane, LURE/Univ. de Paris-Sud (France)
Stephan Megtert, LURE/Univ. de Paris-Sud (France)

Published in SPIE Proceedings Vol. 3874:
Micromachining and Microfabrication Process Technology V
James H. Smith; Jean Michel Karam, Editor(s)

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