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Proceedings Paper

Fabrication and reliability testing of Ti/TiN heaters
Author(s): Piet De Moor; Ann Witvrouw; Veerle Simons; Ingrid De Wolf
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Paper Abstract

We present a new material for highly resistive heaters: thin Ti/TiN layers. Their resistivity is indeed comparable to the resistivity of NiCr, i.e. 50-100 micro-Ohn-cm. However, as opposed to the latter material, Ti/TiN is CMOS compatible and thus easier to incorporate in CMOS integrated MEMS processing. To test the reliability of thin Ti/TiN resistive heaters, both 5 nm Ti/30 nm TiN and 5 nm Ti/60 nm TiN heaters were fabricated. A thermal analysis shows a small temperature coefficient of resistivity. To test the reliability of such heaters at temperatures up to 300 degrees C, 1 micron wide Ti/TiN lines were biased using high currents. Both DC and pulsed DC current stressing resulted in very small deviations from the initial resistance for sintered and passivated heaters. The temperature uniformity over the heater line is investigated using Emission Microscopy.

Paper Details

Date Published: 30 August 1999
PDF: 10 pages
Proc. SPIE 3874, Micromachining and Microfabrication Process Technology V, (30 August 1999); doi: 10.1117/12.361232
Show Author Affiliations
Piet De Moor, IMEC (Belgium)
Ann Witvrouw, IMEC (Belgium)
Veerle Simons, IMEC (Belgium)
Ingrid De Wolf, IMEC (Belgium)


Published in SPIE Proceedings Vol. 3874:
Micromachining and Microfabrication Process Technology V
James H. Smith; Jean Michel Karam, Editor(s)

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