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Proceedings Paper

Fabrication of plastic microparts on wafer level
Author(s): Lutz Weber; Wolfgang Ehrfeld; Marc Begemann; Udo Berg; Frank Michel
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Paper Abstract

In the recent years micromolding has become one of the most important key technologies of microengineering. At the current state of art, the mass fabrication of plastic microparts for a wide range of applications like telecommunications, sensors, medical technology and biochemistry is feasible. Here a micro motor, plastic optical waveguides, a micro pump, and nanotiterplates are presented.

Paper Details

Date Published: 30 August 1999
PDF: 9 pages
Proc. SPIE 3874, Micromachining and Microfabrication Process Technology V, (30 August 1999); doi: 10.1117/12.361226
Show Author Affiliations
Lutz Weber, Institut fuer Mikrotechnik Mainz GmbH (Germany)
Wolfgang Ehrfeld, Institut fuer Mikrotechnik Mainz GmbH (Germany)
Marc Begemann, Institut fuer Mikrotechnik Mainz GmbH (Germany)
Udo Berg, Institut fuer Mikrotechnik Mainz GmbH (Germany)
Frank Michel, Institut fuer Mikrotechnik Mainz GmbH (Germany)


Published in SPIE Proceedings Vol. 3874:
Micromachining and Microfabrication Process Technology V
James H. Smith; Jean Michel Karam, Editor(s)

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