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Proceedings Paper

Integration issues for pressure sensors
Author(s): Bishnu P. Gogoi; David J. Monk; Theresa Maudie; Todd F. Miller; Jose Torres
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Paper Abstract

This paper looks at the issues related to the integration of pressure sensors with the control circuit necessary to achieve the demands of increased performance measured by such parameters as linearity, resolution, accuracy and temperature sensitivity. In addition, the media in which these devices are used can influence the performance considerably with attendant offsets and drifts. Results of the effects of the media exposure on capacitive pressure sensors are presented. The motivation for integrating the sensor with the control circuit is then discussed with respect to these experimental results.

Paper Details

Date Published: 30 August 1999
PDF: 14 pages
Proc. SPIE 3874, Micromachining and Microfabrication Process Technology V, (30 August 1999); doi: 10.1117/12.361220
Show Author Affiliations
Bishnu P. Gogoi, Motorola (United States)
David J. Monk, Motorola (United States)
Theresa Maudie, Motorola (United States)
Todd F. Miller, Motorola (United States)
Jose Torres, Motorola (United States)


Published in SPIE Proceedings Vol. 3874:
Micromachining and Microfabrication Process Technology V
James H. Smith; Jean Michel Karam, Editor(s)

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