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Proceedings Paper

3D silicon photonic lattices: cornerstone of an emerging photonics revolution
Author(s): James G. Fleming; Shawn-Yu Lin
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Paper Abstract

3D photonic lattices are engineered 'materials' which are the photonic analogues of semiconductors. These structures were first proposed and demonstrated in the mid-to-late 1980's. However, due to fabrication difficulties, lattices active in the IR are only just emerging. Wide ranges of structures and fabrication approaches have been investigated. The most promising approaches have been investigated. The most promising approach for many potential applications is a diamond-like structure fabricated using silicon microprocessing techniques. This approach has enabled the fabrication of 3D silicon photonic lattices active in the IR. The structures display band gaps centered from 12(mu) down to 1.55 (mu) .

Paper Details

Date Published: 30 August 1999
PDF: 10 pages
Proc. SPIE 3874, Micromachining and Microfabrication Process Technology V, (30 August 1999); doi: 10.1117/12.361218
Show Author Affiliations
James G. Fleming, Sandia National Labs. (United States)
Shawn-Yu Lin, Sandia National Labs. (United States)


Published in SPIE Proceedings Vol. 3874:
Micromachining and Microfabrication Process Technology V
James H. Smith; Jean Michel Karam, Editor(s)

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