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Proceedings Paper

Fabrication of Au/PZT/BIT/Si heterostructure by pulsed-laser deposition
Author(s): Jun Yu; Xiaoming Dong; Wen-li Zhou; Yun-bo Wang; You-qing Wang; Yuankai Zheng; Hua Wang; Ji-fan Xie; Gang Liu
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Paper Abstract

The MFS heterostructures with structure of Au/PZT/p-Si and Au/PZT/BIT/p-Si were fabricated using pulsed laser deposition technique. The PZT ferroelectric thin films were deposited directly on Si or with a BIT buffer layer. P-E hysteresis loop, capacitance-voltage characteristics and current-voltage characteristics of the heterostructures were measured respectively. The results are performed and discussed.

Paper Details

Date Published: 8 September 1999
PDF: 5 pages
Proc. SPIE 3862, 1999 International Conference on Industrial Lasers, (8 September 1999); doi: 10.1117/12.361192
Show Author Affiliations
Jun Yu, Huazhong Univ. of Science and Technology (China)
Xiaoming Dong, Huazhong Univ. of Science and Technology (China)
Wen-li Zhou, Huazhong Univ. of Science and Technology (China)
Yun-bo Wang, Huazhong Univ. of Science and Technology (China)
You-qing Wang, Huazhong Univ. of Science and Technology (China)
Yuankai Zheng, Huazhong Univ. of Science and Technology (China)
Hua Wang, Huazhong Univ. of Science and Technology (China)
Ji-fan Xie, Huazhong Univ. of Science and Technology (China)
Gang Liu, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 3862:
1999 International Conference on Industrial Lasers
Fuxi Gan; Horst Weber; Zaiguang Li; Qingming Chen, Editor(s)

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