Share Email Print
cover

Proceedings Paper

Fabrication of Au/PZT/BIT/Si heterostructure by pulsed-laser deposition
Author(s): Jun Yu; Xiaoming Dong; Wen-li Zhou; Yun-bo Wang; You-qing Wang; Yuankai Zheng; Hua Wang; Ji-fan Xie; Gang Liu
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The MFS heterostructures with structure of Au/PZT/p-Si and Au/PZT/BIT/p-Si were fabricated using pulsed laser deposition technique. The PZT ferroelectric thin films were deposited directly on Si or with a BIT buffer layer. P-E hysteresis loop, capacitance-voltage characteristics and current-voltage characteristics of the heterostructures were measured respectively. The results are performed and discussed.

Paper Details

Date Published: 8 September 1999
PDF: 5 pages
Proc. SPIE 3862, 1999 International Conference on Industrial Lasers, (8 September 1999); doi: 10.1117/12.361192
Show Author Affiliations
Jun Yu, Huazhong Univ. of Science and Technology (China)
Xiaoming Dong, Huazhong Univ. of Science and Technology (China)
Wen-li Zhou, Huazhong Univ. of Science and Technology (China)
Yun-bo Wang, Huazhong Univ. of Science and Technology (China)
You-qing Wang, Huazhong Univ. of Science and Technology (China)
Yuankai Zheng, Huazhong Univ. of Science and Technology (China)
Hua Wang, Huazhong Univ. of Science and Technology (China)
Ji-fan Xie, Huazhong Univ. of Science and Technology (China)
Gang Liu, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 3862:
1999 International Conference on Industrial Lasers
Fuxi Gan; Horst Weber; Zaiguang Li; Qingming Chen, Editor(s)

© SPIE. Terms of Use
Back to Top