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Proceedings Paper

Analysis of fabrication errors for the binary optical resonator of a high-power CO2 laser
Author(s): Sitao Li; Qiyang Xu; Desheng Xu; Zhixia Guo; Jiaxiong Ye; Ruan Yu; Guoping Zhang
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Paper Abstract

A binary optical resonator (BOR) can effectively improve the quality of the output beam. However, the process quality of the binary optical element (BOE) affects the laser beam closely. In this paper, a BOR, whose eigenmode is square- cross-section 10th order super-Gaussian fundamental beam, with a 16 levels BOE having square aperture, as an example, the fabrication errors such as step width error, etching depth error and mask offset error were discussed. The affect of root mean square (rms) of the output wave relative to desired wave was analyzed. The relationship of rms of output wave relative to step width error, etching depth error and mask offset error were presented respectively. Research shows that the etching depth error has a large affect for the mode distribution in resonator.

Paper Details

Date Published: 8 September 1999
PDF: 4 pages
Proc. SPIE 3862, 1999 International Conference on Industrial Lasers, (8 September 1999); doi: 10.1117/12.361174
Show Author Affiliations
Sitao Li, Huazhong Univ. of Science and Technology (China)
Qiyang Xu, Huazhong Univ. of Science and Technology (China)
Desheng Xu, Huazhong Univ. of Science and Technology (China)
Zhixia Guo, Huazhong Univ. of Science and Technology (China)
Jiaxiong Ye, Huazhong Univ. of Science and Technology (China)
Ruan Yu, Huazhong Univ. of Science and Technology (China)
Guoping Zhang, Central China Normal Univ. (China)


Published in SPIE Proceedings Vol. 3862:
1999 International Conference on Industrial Lasers
Fuxi Gan; Horst Weber; Zaiguang Li; Qingming Chen, Editor(s)

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