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Proceedings Paper

Temporal characteristic of KrF excimer spectrum generated by discharge exciting without additional fluorine donor
Author(s): Chang-yong Li; Liantuan Xio; Suotang Jia; Shusen Ma; Tianshu Hu; Zhaoping Zhang
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Paper Abstract

Without additional fluorine donor, the Kr/Ne mixture was excited in a excimer laser with Teflon surface preionization plates. The relative UV spectrum was obtained by ways of spectrograph and scanning. The formation of KrF excimer was affirmed. The temporal characteristic of relevant spectra was analyzed. It was found that the lasting time of the KrF excimer emission is about five times as much as that of the discharge current pulse. This indicates that the main process of forming KrF excimer is harpooning reaction but the ion combined reaction that is the main process in general KrF laser.

Paper Details

Date Published: 8 September 1999
PDF: 3 pages
Proc. SPIE 3862, 1999 International Conference on Industrial Lasers, (8 September 1999); doi: 10.1117/12.361144
Show Author Affiliations
Chang-yong Li, Shanxi Univ. (China)
Liantuan Xio, Shanxi Univ. (China)
Suotang Jia, Shanxi Univ. (China)
Shusen Ma, Anhui Institute of Optics and Fine Mechanics (China)
Tianshu Hu, Anhui Institute of Optics and Fine Mechanics (China)
Zhaoping Zhang, Anhui Institute of Optics and Fine Mechanics (China)

Published in SPIE Proceedings Vol. 3862:
1999 International Conference on Industrial Lasers
Fuxi Gan; Horst Weber; Zaiguang Li; Qingming Chen, Editor(s)

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