Share Email Print
cover

Proceedings Paper

Measurement system for the parameters of integrated optical film
Author(s): Zhiguo Tan; Zhene Xu; Qingsong Wu; Shimin Li; Qiong Xie
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

The refractive index and the thickness of integrated optical film, due to its small size, are difficult to measure without understanding of the nature of light in the guiding medium. Popular method used to measure these two parameters is based on ellipsometry. We herein demonstrate an innovative measurement system based on the prism-coupling. We have contrasted the traditional method with this new measurement system. The principle and setup of this design are illustrated. The theorized value and simulation results are presented.

Paper Details

Date Published: 8 September 1999
PDF: 4 pages
Proc. SPIE 3862, 1999 International Conference on Industrial Lasers, (8 September 1999); doi: 10.1117/12.361134
Show Author Affiliations
Zhiguo Tan, Huazhong Univ. of Science and Technology (China)
Zhene Xu, Huazhong Univ. of Science and Technology (China)
Qingsong Wu, Huazhong Univ. of Science and Technology (China)
Shimin Li, Huazhong Univ. of Science and Technology (China)
Qiong Xie, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 3862:
1999 International Conference on Industrial Lasers

© SPIE. Terms of Use
Back to Top