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Proceedings Paper

Numerical study of pulsed-laser scanning deposition in a diluted ambient gas
Author(s): Jun Li; Runzhang Yuan
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Paper Abstract

Laser scanning deposition process is numerically investigated by the means of a Monte-Carlo method. The transport of the atoms ablated from the target through a diluted ambient gas is simulated. Specifically, the influences of the ambient gas (0.0133 - 13.3 Pa), the laser scanning radius, and the substrate-target distance on the spatial distribution and mean energy of the ablated atoms deposited on the substrate are studied. Knowledge useful to understanding the laser scanning deposition process is obtained.

Paper Details

Date Published: 8 September 1999
PDF: 4 pages
Proc. SPIE 3862, 1999 International Conference on Industrial Lasers, (8 September 1999); doi: 10.1117/12.361122
Show Author Affiliations
Jun Li, Wuhan Univ. of Technology (Canada)
Runzhang Yuan, Wuhan Univ. of Technology (China)

Published in SPIE Proceedings Vol. 3862:
1999 International Conference on Industrial Lasers
Fuxi Gan; Horst Weber; Zaiguang Li; Qingming Chen, Editor(s)

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