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Proceedings Paper

Large-area thin film preparation by a hybrid scanning laser ablation
Author(s): You-qing Wang; Xintang Huang; Chengwu An; Qingming Chen; Qiyang Xu; Zhaiguang Li
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Paper Abstract

In this paper an improved approach of large area superconducting thin film deposition by a hybrid scanning laser ablation is proposed, in which the pulsed laser radiates a target along a specially designed track just like planet-movement trajectory. The calculation results show that the thickness distribution of films is more homogeneous than that with the simple circle scanning ablation, and an optimum dependence of film thickness homogeneity on such parameters as scanning track, and scanning speed etc. is presented. The tentative experimental study indicates the effectiveness of this method.

Paper Details

Date Published: 8 September 1999
PDF: 5 pages
Proc. SPIE 3862, 1999 International Conference on Industrial Lasers, (8 September 1999); doi: 10.1117/12.361117
Show Author Affiliations
You-qing Wang, Huazhong Univ. of Science and Technology (China)
Xintang Huang, Huazhong Univ. of Science and Technology (China)
Chengwu An, Huazhong Univ. of Science and Technology (China)
Qingming Chen, Huazhong Univ. of Science and Technology (China)
Qiyang Xu, Huazhong Univ. of Science and Technology (China)
Zhaiguang Li, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 3862:
1999 International Conference on Industrial Lasers
Fuxi Gan; Horst Weber; Zaiguang Li; Qingming Chen, Editor(s)

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