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Proceedings Paper

Development of a hightly transparent fluorescent optical sensor for transverse positioning of multiple elements with respect to a reference laser beam
Author(s): J.-Ch. Barriere; H. Blumenfeld; Michel J. Bourdinaud; O. Cloue; F. Molinie; Phillippe Schune
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Paper Abstract

A new type of highly transparent (95%) two dimensional position sensor has been developed which allows the accurate positioning (below 10 micrometers r.m.s.) of successive elements to which each sensor is attached, transversely to a laser beam used as a reference straight line. The present useful area of the sensor is about 15 X 15 mm2, and can be further increased.

Paper Details

Date Published: 9 September 1999
PDF: 8 pages
Proc. SPIE 3823, Laser Metrology and Inspection, (9 September 1999); doi: 10.1117/12.360989
Show Author Affiliations
J.-Ch. Barriere, CEA Saclay (France)
H. Blumenfeld, CEA Saclay (France)
Michel J. Bourdinaud, CEA Saclay (France)
O. Cloue, CEA Saclay (France)
F. Molinie, CEA Saclay (France)
Phillippe Schune, CEA Saclay (France)

Published in SPIE Proceedings Vol. 3823:
Laser Metrology and Inspection

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