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Proceedings Paper

Concept for zero-alignment micro-optical systems
Author(s): Raviv Levy; Michael R. Descour; Randy J. Shul; Christi Lober Willison; Mial E. Warren; Terho K. Kololuoma; Juha T. Rantala
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Paper Abstract

In this paper we present the results of the first fabrication and micro-assembly experiments of a silicon- wafer based micro-optical table (MOT). Based on these experiments, estimates of position accuracy are reported. We also report on progress in fabrication of lens elements in a hybrid sol-gel material (HSGM). Diffractive optical elements have been patterned in a 13-micron thick HSGM layer on a 150-micron thick soda-lime glass substrate. The measured rms surface roughness was 20 nm. Finally, we describe modeling of MOT systems using non-sequential ray tracing.

Paper Details

Date Published: 31 August 1999
PDF: 7 pages
Proc. SPIE 3879, Micromachine Technology for Diffractive and Holographic Optics, (31 August 1999); doi: 10.1117/12.360521
Show Author Affiliations
Raviv Levy, Optical Sciences Ctr./Univ. of Arizona (United States)
Michael R. Descour, Optical Sciences Ctr./Univ. of Arizona (United States)
Randy J. Shul, Sandia National Labs. (United States)
Christi Lober Willison, Sandia National Labs. (United States)
Mial E. Warren, Sandia National Labs. (United States)
Terho K. Kololuoma, VTT Electronics (Finland)
Juha T. Rantala, VTT Electronics (Finland)


Published in SPIE Proceedings Vol. 3879:
Micromachine Technology for Diffractive and Holographic Optics
Sing H. Lee; J. Allen Cox, Editor(s)

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