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Proceedings Paper

High-frequency gratings as polarization elements
Author(s): Margit Ferstl; Ralf Steingrueber; Daniel Dias; Svetomir Stankovic; Helmut Haidner
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Paper Abstract

Binary gratings with feature sizes smaller than the illumination wavelength were fabricated in quartz glass by means of microstructuring techniques. Using rigorous coupled wave analysis polarization elements like polarizing beam splitters and phase retardation plates were designed for operation in transmission at the wavelength of 650 nm. High frequency polarization gratings with feature sizes down to 140 nm and aspect ratios up to 7 were realized. For the polarization selective beam splitting elements we measured diffraction efficiencies of about 80% in the -1st order for TE polarization, and 90% in the 0th order for TM polarization. The values are in good agreement with the theoretical values. Furthermore we realized phase retarding elements e.g. (lambda) /8-plates which showed a phase difference of (Phi) equals 44.8 degree(s) ((Phi) theor. equals 45 degree(s)) between TE and TM polarized light. The design and the fabrication process as well as the optical properties of our high frequency binary phase gratings will be presented. Experimental results will be compared with theoretical values.

Paper Details

Date Published: 31 August 1999
PDF: 9 pages
Proc. SPIE 3879, Micromachine Technology for Diffractive and Holographic Optics, (31 August 1999); doi: 10.1117/12.360518
Show Author Affiliations
Margit Ferstl, Heinrich-Hertz-Institut fuer Nachrichtentechnik Berlin GmbH (Germany)
Ralf Steingrueber, Heinrich-Hertz-Institut fuer Nachrichtentechnik Berlin GmbH (Germany)
Daniel Dias, Technical Univ. Darmstadt (Germany)
Svetomir Stankovic, Technical Univ. Darmstadt (Serbia)
Helmut Haidner, Technical Univ. Darmstadt (Germany)

Published in SPIE Proceedings Vol. 3879:
Micromachine Technology for Diffractive and Holographic Optics
Sing H. Lee; J. Allen Cox, Editor(s)

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