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Proceedings Paper

Quasi-continuous mask-coding method for fabricating diffractive optical elements
Author(s): Liping Zhao; Yee Loy Lam; Yan Zhou
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Paper Abstract

Based on the analysis of the effect of fabrication errors on diffraction efficiency of a diffractive optical element and image quality of a binary optical lens (BOL), a novel quasi- continuous mask-coding (QCMC) method is presented in this paper. This coding method puts forward a series of new mask patterns, making it possible to fabricate quasi-continuous micro profile by using the same number of masks as employed in the traditional `binary' fabrication technology. The QCMC technique breaks through the current convention for coding m masks to get the micro profile with 2m steps in one zone. This paper presents the theory of the QCMC method and provides examples of practical mask patterns. by using QCMC, BOLs with enhanced diffraction efficiency can be fabricated by traditional multilayer micro fabrication method or by laser writing technology without any additional equipment or processing procedure. Employing this method will enhance the diffraction efficiency, the optical performance, and in particular the image quality of a hybrid optical imaging system.

Paper Details

Date Published: 31 August 1999
PDF: 10 pages
Proc. SPIE 3879, Micromachine Technology for Diffractive and Holographic Optics, (31 August 1999); doi: 10.1117/12.360515
Show Author Affiliations
Liping Zhao, Nanyang Technological Univ. (Singapore)
Yee Loy Lam, Nanyang Technological Univ. (Singapore)
Yan Zhou, Nanyang Technological Univ. (Singapore)


Published in SPIE Proceedings Vol. 3879:
Micromachine Technology for Diffractive and Holographic Optics
Sing H. Lee; J. Allen Cox, Editor(s)

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