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Proceedings Paper

Linear magnetic position sensor for automotive applications
Author(s): Zhixiang Liu; Li Tian; Jim Parham; A. Bruno Frazier
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Paper Abstract

In this work, a linear position sensor with a Hall effect element for automotive applications is presented. The work involves the design of device structure, finite element analysis (FEA) computer modeling of sensor performance, fabrication of sensor prototype, and prototype characterization. The significance of the work is a low cost linear position sensor has been developed with high linearity for use in automobile control systems. The complete sensor system is designed for ease of manufacturing and the harsh automotive environments. The output data from the two- dimensional basic ideal structure model shows high linearity over a range of 11 mm. Models of temperature coefficient effect (TCE), electromagnetic interference (EMI), and several optimized device structures, including reducing the thickness of bottom material, shaping of the corners as well as adding shield material were also analyzed. The sensor prototype was fabricated and characterized. The modeling data were compared with the measurement results from the sensor prototype.

Paper Details

Date Published: 31 August 1999
PDF: 12 pages
Proc. SPIE 3876, Micromachined Devices and Components V, (31 August 1999); doi: 10.1117/12.360507
Show Author Affiliations
Zhixiang Liu, Univ. of Utah and American Microsystems, Inc. (United States)
Li Tian, Univ. of Utah (United States)
Jim Parham, Bourns, Inc. (United States)
A. Bruno Frazier, Univ. of Utah and Georgia Institute of Technology (United States)


Published in SPIE Proceedings Vol. 3876:
Micromachined Devices and Components V
Patrick J. French; Eric Peeters, Editor(s)

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