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Proceedings Paper

Performance analysis of a planar vibrating microgyroscope using a dynamic model with respect to angular rate frequency
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Paper Abstract

A dynamic model for a vibrating microgyroscope with respect to angular rate is derived. Using the dynamic model, responses of the vibrating microgyroscope with respect to angular rate input is analyzed. A microgyroscope, which vibrates on the substrate plane, is designed and fabricated by simplified fabrication processes using single polysilicon on insulator structure. The validity of the derived dynamic model is tested by comparing simulation results with and experiments. The performance of the fabricated microgyroscope is investigated in a vacuum chamber of 100 mtorr. The obtained sensitivity of the microgyroscope at a typical static angular rate is 5 mV s/degree.

Paper Details

Date Published: 31 August 1999
PDF: 10 pages
Proc. SPIE 3876, Micromachined Devices and Components V, (31 August 1999); doi: 10.1117/12.360506
Show Author Affiliations
Yoonshik Hong, Korea Advanced Institute of Science and Technology (South Korea)
Jong-Hyun Lee, Electronics and Telecommunications Research Institute (South Korea)
Soo Hyun Kim, Korea Advanced Institute of Science and Technology (South Korea)


Published in SPIE Proceedings Vol. 3876:
Micromachined Devices and Components V
Patrick J. French; Eric Peeters, Editor(s)

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