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Proceedings Paper

Microelectromechanical high-density energy storage/rapid release system
Author(s): M. Steven Rodgers; James J. Allen; Kent D. Meeks; Brian D. Jensen; Samuel L. Miller
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Paper Abstract

One highly desirable characteristic of electrostatically driven microelectromechanical systems (MEMS) is that they consume very little power. The corresponding drawback is that the force they produce may be inadequate for many applications. It has previously been demonstrated that gear reduction units or microtransmissions can substantially increase the torque generated by microengines. Operating speed, however, is also reduced by the transmission gear ratio. Some applications require both high speed and high force. If this output is only required for a limited period of time, then energy could be stored in a mechanical system and rapidly released upon demand. We have designed, fabricated, and demonstrated a high-density energy storage/rapid release system that accomplishes this task. Built using a 5-level surface micromachining technology, the assembly closely resembles a medieval crossbow. Energy releases on the order of tens of nanojoules have already been demonstrated, and significantly higher energy systems are under development.

Paper Details

Date Published: 31 August 1999
PDF: 11 pages
Proc. SPIE 3876, Micromachined Devices and Components V, (31 August 1999); doi: 10.1117/12.360496
Show Author Affiliations
M. Steven Rodgers, Sandia National Labs. (United States)
James J. Allen, Sandia National Labs. (United States)
Kent D. Meeks, Sandia National Labs. (United States)
Brian D. Jensen, Sandia National Labs. (United States)
Samuel L. Miller, Sandia National Labs. (United States)


Published in SPIE Proceedings Vol. 3876:
Micromachined Devices and Components V
Patrick J. French; Eric Peeters, Editor(s)

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