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Proceedings Paper

Static and dynamic characterization of polysilicon surface-micromachined actuators
Author(s): Volker Laible; Paul M. Hagelin; Olav Solgaard; Ernst Obermeier
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Paper Abstract

A measurement system for static and dynamic characterization of silicon micromachines was developed. The computer- controlled system, using a HeNe-laser at 633 nm and a two- dimensional position sensor, allows simultaneous measurements of optical beam motion on two axes. To demonstrate the flexibility and functionality of the setup, measurements on various polysilicon surface-micromachined mirrors were performed. These measurements included tilt-angle versus driving-voltage curves, frequency responses, and motion perpendicular to the primary scan axis.

Paper Details

Date Published: 31 August 1999
PDF: 9 pages
Proc. SPIE 3876, Micromachined Devices and Components V, (31 August 1999); doi: 10.1117/12.360491
Show Author Affiliations
Volker Laible, Technical Univ. of Berlin (Germany)
Paul M. Hagelin, Univ. of California/Davis (United States)
Olav Solgaard, Univ. of California/Davis (United States)
Ernst Obermeier, Technical Univ. of Berlin (Germany)


Published in SPIE Proceedings Vol. 3876:
Micromachined Devices and Components V
Patrick J. French; Eric Peeters, Editor(s)

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