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Proceedings Paper

MEMS fixtures for handling and assembly of microparts
Author(s): Isam N. Tahhan; Yan Zhuang; Karl F. Boehringer; Kristofer S. J. Pister; Ken Goldberg
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Paper Abstract

Fixtures are used to locate and hold parts during automated inspection, machining, or assembly. Microelectromechanical systems (MEMS) are tiny devices built in batch processes derived from integrated circuit fabrication. We describe a design for an array of MEMS microfixtures for parallel inspection, transport, and assembly of microfabricated parts. In a microfixture array, parts are brought near the fixture by random motion provided e.g. by vibratory agitation. The fixture clamps actively close when the parts enter the fixture. In large future fixture arrays, electrostatic or optical sensors integrated into the fixture cell can trigger this clamping function. Each cell operates autonomously and no global control is necessary. We fabricated a prototype cell consisting of two upfoldable fixture walls and a bimorph thermal actuator using a standard CMOS process. This approach allows batch fabrication of large numbers of cells on a single silicon wafer, as well as easy integration of sensors and actuators that autonomously close each cell when filled.

Paper Details

Date Published: 31 August 1999
PDF: 11 pages
Proc. SPIE 3876, Micromachined Devices and Components V, (31 August 1999); doi: 10.1117/12.360488
Show Author Affiliations
Isam N. Tahhan, Univ. of California/Berkeley (United States)
Yan Zhuang, Univ. of California/Berkeley (United States)
Karl F. Boehringer, Univ. of California/Berkeley (United States)
Kristofer S. J. Pister, Univ. of California/Berkeley (United States)
Ken Goldberg, Univ. of California/Berkeley (United States)


Published in SPIE Proceedings Vol. 3876:
Micromachined Devices and Components V
Patrick J. French; Eric Peeters, Editor(s)

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