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Proceedings Paper

Critical comparison of design- and analysis-of-experiments methods for MEMS metamodel generation
Author(s): Selden B. Crary; Peter Cousseau; Eva H. Mok; David M. Woodcock; Philippe Renaud
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Paper Abstract

We use finite-element simulations of a micromachined gas-flow sensor as an example to demonstrate and critically compare various design- and analysis-of-experiments methods for the generation of simple, surrogate functional approximations. Such approximations can be used to greatly reduce computational expense in MEMS design and optimization. The following design methods are included in our study: factorial, alphabetic (A, D, G, I, and S-optimal), maximin, latin hypercube, central composite, and a method using a new program from the University of Michigan named IMSETTM. Analyses include both a parametric method (ordinary least squares or OLS) and a non-parametric method (best linear unbiased predictor or BLUP).

Paper Details

Date Published: 31 August 1999
PDF: 8 pages
Proc. SPIE 3876, Micromachined Devices and Components V, (31 August 1999); doi: 10.1117/12.360486
Show Author Affiliations
Selden B. Crary, Univ. of Michigan (United States)
Peter Cousseau, Swiss Federal Institute of Technology/Lausanne (Switzerland)
Eva H. Mok, Univ. of Michigan (United States)
David M. Woodcock, Univ. of Michigan (United States)
Philippe Renaud, Swiss Federal Institute of Technology/Lausanne (Switzerland)


Published in SPIE Proceedings Vol. 3876:
Micromachined Devices and Components V
Patrick J. French; Eric Peeters, Editor(s)

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