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Proceedings Paper

Impact testing of silicon-micromachined beams
Author(s): Chung-Hoon Lee; Ville Kaajakari; Amit Lal
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Paper Abstract

Anisotropically etched silicon structures were impacted against stainless steel to measure relative impact strength of different silicon surface treatments. In order to study the effects of surface treatment, the beams were coated with thermal silicon dioxide, LPCVD silicon nitride, and silicon dioxide/silicon nitride sandwich. A jig was made to controllably impact the sample and also measure the stresses during impact. It was found that silicon-dioxide treatment resulted in the highest strength structures and the nitride coated samples being weaker than even the uncoated sample. An explanation based on surface stress effect on crack initiation is presented.

Paper Details

Date Published: 3 September 1999
PDF: 7 pages
Proc. SPIE 3875, Materials and Device Characterization in Micromachining II, (3 September 1999); doi: 10.1117/12.360482
Show Author Affiliations
Chung-Hoon Lee, Univ. of Wisconsin/Madison (United States)
Ville Kaajakari, Univ. of Wisconsin/Madison (United States)
Amit Lal, Univ. of Wisconsin/Madison (United States)

Published in SPIE Proceedings Vol. 3875:
Materials and Device Characterization in Micromachining II
Yuli Vladimirsky; Craig R. Friedrich, Editor(s)

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