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Proceedings Paper

Optical full-field technique for measuring deflection and strain on micromechanical components
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Paper Abstract

Design, manufacturing and test of microcomponents generate new challenges for measurement techniques in general. The non-contacting operation of optical metrology makes it attractive to solve the task of measuring geometric quantities of microparts. So far, speckle interferometry (ESPI) is well established as a measuring tool for analyzing deformation, vibration and strain on a macroscopic level. This paper deals with possibilities and application limits of ESPI in the case of scaling down the object size below one millimeter.

Paper Details

Date Published: 3 September 1999
PDF: 11 pages
Proc. SPIE 3875, Materials and Device Characterization in Micromachining II, (3 September 1999); doi: 10.1117/12.360479
Show Author Affiliations
Petra Aswendt, Fraunhofer-Institut fuer Werkstoffmechanik und Umformtechnik (Germany)
Roland Hoefling, Fraunhofer-Institut fuer Werkstoffmechanik und Umformtechnik (Germany)
Karla Hiller, Chemnitz Univ. of Technology (Germany)


Published in SPIE Proceedings Vol. 3875:
Materials and Device Characterization in Micromachining II
Yuli Vladimirsky; Craig R. Friedrich, Editor(s)

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