Share Email Print
cover

Proceedings Paper

Characterization of nanostructures micromachined with focused ion beams (FIBs)
Author(s): Catherine Y. Wong; Jie Xhie; Keith M. Moulding
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

In this paper the authors would like to demonstrate, using Atomic Force Microscopy (AFM), the effects of parameters such as probe current on the micromachined profiles produced by focused ion beam. We will compare these results obtained with AFM with those using scanning electron microscopy. Control of these parameters in the fabrication of nanostructures on different substrate materials such as metals and semiconductors will also be demonstrated.

Paper Details

Date Published: 3 September 1999
PDF: 9 pages
Proc. SPIE 3875, Materials and Device Characterization in Micromachining II, (3 September 1999); doi: 10.1117/12.360478
Show Author Affiliations
Catherine Y. Wong, Hong Kong Univ. of Science and Technology (Hong Kong)
Jie Xhie, Hong Kong Univ. of Science and Technology (Hong Kong)
Keith M. Moulding, Hong Kong Univ. of Science and Technology (Hong Kong)


Published in SPIE Proceedings Vol. 3875:
Materials and Device Characterization in Micromachining II
Yuli Vladimirsky; Craig R. Friedrich, Editor(s)

© SPIE. Terms of Use
Back to Top