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Proceedings Paper

Reliability of silicon nitride as structural material in MEMS
Author(s): Robert Kazinczi; Jeff R. Mollinger; Andre Bossche
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Paper Abstract

Micromechanical devices have just entered out everyday life and have a wide range of applications in the near future. Therefore a strong need arises for elaborate study on reliability of micromechanical structures under various conditions and environments. Silicon nitride is one of the basic structural materials in MEMS devices due to its good mechanical properties. Extreme aspect ratio structures like long cantilevers or large membranes are often built of thin silicon nitride films. They serve mostly as mechanical supporting components forming multilayer structures. Precise characterization of the mechanical properties is required for proper design and reliable device operation. Atomic force microscope was utilized for measurement of Young's modulus and spring constant of silicon nitride cantilever beams. Static and dynamic accelerated aging tests were conducted in order to predict the long-term behavior of the structures. Two reversed failure mechanisms were found during the aging tests, both substantially effecting the device operation.

Paper Details

Date Published: 3 September 1999
PDF: 10 pages
Proc. SPIE 3875, Materials and Device Characterization in Micromachining II, (3 September 1999); doi: 10.1117/12.360469
Show Author Affiliations
Robert Kazinczi, Delft Univ. of Technology (Netherlands)
Jeff R. Mollinger, Delft Univ. of Technology (Netherlands)
Andre Bossche, Delft Univ. of Technology (Netherlands)

Published in SPIE Proceedings Vol. 3875:
Materials and Device Characterization in Micromachining II
Yuli Vladimirsky; Craig R. Friedrich, Editor(s)

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