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Proceedings Paper

Micro cycloid-gear system fabricated by multiexposure LIGA technique
Author(s): Toru Hirata; Song-Jo Chung; Herbert Hein; Tomoyuki Akashi; Juergen Mohr
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Paper Abstract

In this paper, a prototype of 2 mm-diameter micro-cycloid gear system fabricated by the multi-exposure LIGA technique is presented. The entire gear system consists of a casing and three vertically stacked disks and gears. Each part is composed of three different levels. The first level, 40 micrometers high, was fabricated by UV-lithography, and the second as well as the third level, 195 micrometers and 250 micrometers high respectively, were processed by aligned deep X-ray lithography (DXL). The alignment error between two DXL- processed layers was measured, and the results have turned out to be within +/- 5 micrometers range. As a result of the height control process by the mechanical surface machining, the deviation of structural height has been maintained within +/- 3 micrometers range for the UV-lithography-processed structures, and +/- 10 micrometers for the DXL-processed structures. Further the tests of gear assembly were implemented with 125 micrometers -diameter glass fiber, by using a die-bonding machine with vacuum gripper under stereo- microscope. Finally the dynamic tests of the gear system were successfully conducted with the mechanical torque input by an electrical motor. A proper rotational speed reduction was observed in the operational input range of 3 to 1500 rpm with the designed gear ratio of 18.

Paper Details

Date Published: 3 September 1999
PDF: 8 pages
Proc. SPIE 3875, Materials and Device Characterization in Micromachining II, (3 September 1999); doi: 10.1117/12.360468
Show Author Affiliations
Toru Hirata, Sumitomo Heavy Industries, Ltd. (Japan)
Song-Jo Chung, Forschungszentrum Karlsruhe GmbH (Germany)
Herbert Hein, Forschungszentrum Karlsruhe GmbH (Germany)
Tomoyuki Akashi, Sumitomo Heavy Industries, Ltd. (Japan)
Juergen Mohr, Forschungszentrum Karlsruhe GmbH (Germany)


Published in SPIE Proceedings Vol. 3875:
Materials and Device Characterization in Micromachining II
Yuli Vladimirsky; Craig R. Friedrich, Editor(s)

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