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Proceedings Paper

New dimensions of micromachining with 157-nm laser light
Author(s): Michael Kauf; Heinrich Endert; John H. Fair; Rainer Paetzel; Michael J. Scaggs; Dirk Basting
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Paper Abstract

Fluorine (F2) lasers emit at 157 nm, the shortest commercially available laser wavelength. Innovations such as NovaTubeTM technology have resulted in powerful, highly reliable and cost effective F2 lasers. This paper will discuss the most recent F2 laser developments, resulting in repetition rates up to 1000 Hz and pulse energies in excess of 25 mJ. The industry now considers F2 lasers to be the next step (after ArF at 193 nm) in key technologies such as lithography and micromachining.

Paper Details

Date Published: 3 September 1999
PDF: 7 pages
Proc. SPIE 3875, Materials and Device Characterization in Micromachining II, (3 September 1999); doi: 10.1117/12.360464
Show Author Affiliations
Michael Kauf, Lambda Physik Inc. (United States)
Heinrich Endert, Lambda Physik Inc. (United States)
John H. Fair, Lambda Physik Inc. (United States)
Rainer Paetzel, Lambda Physik GmbH (Germany)
Michael J. Scaggs, Lambda Physik Inc. (United States)
Dirk Basting, Lambda Physik GmbH (United States)


Published in SPIE Proceedings Vol. 3875:
Materials and Device Characterization in Micromachining II
Yuli Vladimirsky; Craig R. Friedrich, Editor(s)

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