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Proceedings Paper

Development of pellicle for ArF excimer laser
Author(s): Shigeto Shigematsu; Masahiro Kondo; Hiroaki Nakagawa
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Paper Abstract

We tested the membrane longevity of the fluoropolymer using narrow-banded ArF Excimer Laser with spectro-width 0.8 pm. We compared the result with that of using free-run Laser which is not narrow-banded with spectro-width 450 pm. We obtained the following findings: (1) Under the air environment, the membrane longevity improves about 4 times by using narrow- banded Laser compared to free-run Laser. A transmission deterioration due to creation of the light absorption substances on the membrane is not occurred under the air environment either by free-run Laser or by narrow-banded Laser. (2) Under the nitrogen environment, creation of the light absorption substances is suppressed by using narrow- banded Laser, and this leads to the membrane longevity improvement. However, as compared to under the air environment, the membrane longevity is shortened by approximately 10 times.

Paper Details

Date Published: 25 August 1999
PDF: 11 pages
Proc. SPIE 3748, Photomask and X-Ray Mask Technology VI, (25 August 1999); doi: 10.1117/12.360211
Show Author Affiliations
Shigeto Shigematsu, Mitsui Chemicals, Inc. (Japan)
Masahiro Kondo, Mitsui Chemicals, Inc. (Japan)
Hiroaki Nakagawa, Mitsui Chemicals, Inc. (Japan)


Published in SPIE Proceedings Vol. 3748:
Photomask and X-Ray Mask Technology VI
Hiroaki Morimoto, Editor(s)

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