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Proceedings Paper

Surface roughness and subsurface damage characterization of fused silica substrates
Author(s): Andreas Wuttig; Joerg Steinert; Angela Duparre; Horst Truckenbrodt
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Paper Abstract

The surface microtopography and subsurface damage of fused silica have been examined after different stages of the manufacturing process. Results are presented of etching experiments and measurements performed by white light interferometry, atomic force microscopy and total light scattering.

Paper Details

Date Published: 6 September 1999
PDF: 8 pages
Proc. SPIE 3739, Optical Fabrication and Testing, (6 September 1999); doi: 10.1117/12.360168
Show Author Affiliations
Andreas Wuttig, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)
Joerg Steinert, Technical Univ. of Ilmenau (Germany)
Angela Duparre, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)
Horst Truckenbrodt, Technical Univ. of Ilmenau (Germany)

Published in SPIE Proceedings Vol. 3739:
Optical Fabrication and Testing
Roland Geyl; Jonathan Maxwell, Editor(s)

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