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Proceedings Paper

Comparative study of the roughness of optical surfaces and thin films using atomic force microscopy, x-ray scattering, and light scattering methods
Author(s): Igor V. Kozhevnikov; Victor E. Asadchikov; Angela Duparre; Oleg N. Gilev; Nikolai A. Havronin; Yury S. Krivonosov; Vladimir I. Ostashev; Joerg Steinert
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Paper Abstract

The surface roughness of polished glass substrates as well as metal an dielectric coatings is studied using atomic force microscopy, hard and soft x-ray scattering at the wavelength (lambda) equals 0.154 nm and 4.47 nm, and light scattering (LS) at (lambda) equals 325 nm. It is demonstrated that all the methods, permitting the determination of PSD functions in partly overlapping, partly different ranges of spatial frequency, are in a good agreement in spite of different physical principles underlying the methods. The possible reasons for some differences in the PSD functions determined form different measurements are discussed. The main of them are a more difficult interpretation of LS data when dielectric coatings are present and a limitation on the angular range of hard x-ray scattering measurements imposed by the applicability of the perturbation theory used for experimental data processing.

Paper Details

Date Published: 6 September 1999
PDF: 7 pages
Proc. SPIE 3739, Optical Fabrication and Testing, (6 September 1999); doi: 10.1117/12.360165
Show Author Affiliations
Igor V. Kozhevnikov, P.N. Lebedev Physical Institute (Russia)
Victor E. Asadchikov, Institute of Crystallography (Russia)
Angela Duparre, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)
Oleg N. Gilev, Russian Federal Nuclear Ctr. (Russia)
Nikolai A. Havronin, Russian Federal Nuclear Ctr. (Russia)
Yury S. Krivonosov, Institute of Crystallography (Russia)
Vladimir I. Ostashev, Russian Federal Nuclear Ctr. (Russia)
Joerg Steinert, Technical Univ. of Ilmenau (Germany)

Published in SPIE Proceedings Vol. 3739:
Optical Fabrication and Testing
Roland Geyl; Jonathan Maxwell, Editor(s)

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