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Proceedings Paper

Critical aspects of testing aspheres in interferometric setups
Author(s): Frank Schillke
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Paper Abstract

Several critical aspects when testing aspherical surfaces by means of interferometry are reported. The aspheres are in the range of some microns to some 100 microns to some 100 microns of deviation from best fitting spheres. The required accuracy is a few nm. A compensating system has to be used to transform the interferometer's spherical wavefront to a wavefront that fits the asphere under test. Some special aspects will be discussed that are different to the test of spheres. Effects on the wavefront from lateral distortion, field curvature, and alignment of the compensating system need to be handled. The most problematic item up to now is the limited accuracy of the rotational symmetrical errors. The calibration of those errors still is much more uncertain than calibrations of unsymmetric errors or complete calibrations of spheres.

Paper Details

Date Published: 6 September 1999
PDF: 8 pages
Proc. SPIE 3739, Optical Fabrication and Testing, (6 September 1999); doi: 10.1117/12.360159
Show Author Affiliations
Frank Schillke, Carl Zeiss (Germany)


Published in SPIE Proceedings Vol. 3739:
Optical Fabrication and Testing
Roland Geyl; Jonathan Maxwell, Editor(s)

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