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Proceedings Paper

Measuring the absolute planarity of test plates with a modified Fritz's method
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Paper Abstract

The Fritz's method using Zernike polynomials to assess the absolute planarity of test plates is revisited. Such method is based on four interferometric measurements, which are assumed perfectly correlated. In experiments, due to several instability sources, the data set is missing perfect correlation. Modifications of the Fritz's method are here presented, taking into account the residual uncorrelation of the data; such modified approach is demonstrated on a data set from experiments, achieving nanometer uncertainty level.

Paper Details

Date Published: 6 September 1999
PDF: 4 pages
Proc. SPIE 3739, Optical Fabrication and Testing, (6 September 1999); doi: 10.1117/12.360152
Show Author Affiliations
Vincenzo Greco, Istituto Nazionale di Ottica (Italy)
Giuseppe Molesini, Istituto Nazionale di Ottica (Italy)


Published in SPIE Proceedings Vol. 3739:
Optical Fabrication and Testing
Roland Geyl; Jonathan Maxwell, Editor(s)

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