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Proceedings Paper

Phase-step calibration
Author(s): Hedser H. van Brug
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Paper Abstract

An effective method to obtain the phase distribution is to use phase stepped interferometry. By recording a number of interferograms, all having a different phase step between the interfering beams, the phase distribution can be calculated. The accuracy of the phase distribution depends strongly on the accuracy of the applied phase step, i.e. the change in phase difference between the interfering beams. A novel scheme is presented that yields the change in phase difference between two recordings. It is shown that the calculation of the correlation between the two recording can directly be used to obtain the difference in phase stp between the two recordings. The accuracy in the obtained phase step value is better than 0.1 percent for all commonly used phase steps.

Paper Details

Date Published: 6 September 1999
PDF: 10 pages
Proc. SPIE 3739, Optical Fabrication and Testing, (6 September 1999); doi: 10.1117/12.360151
Show Author Affiliations
Hedser H. van Brug, Delft Univ. of Technology (Netherlands)


Published in SPIE Proceedings Vol. 3739:
Optical Fabrication and Testing
Roland Geyl; Jonathan Maxwell, Editor(s)

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