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Proceedings Paper

Excimer laser fabrication and optical properties of polymer prismatic microstructures
Author(s): Patrice A. Topart; Daniel Plessis; Eric Monterrat; Pierre Coquard; Herve Piombini
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Paper Abstract

This paper reports on the fabrication of prismatic microstructures on polymer films by a combination of KrF laser micromachining and hot embossing. Typical values of depth and pitch of prisms lie between 50 and 200 micrometers . Optical properties of such polymer surface sin the mid-IR are based on a geometrical optics mechanism. The UV ablation of V channels is achieved by projecting a (Delta) shaped mask onto the workpiece. Both poly(methylmethacrylate) and polyimide plates were machined. THe dependence of depth of grooves on mask shape, laser fluence, ablation rate of material, positioning table velocity and process gas has been investigated for both polymers. At 248 nm, the higher ablation rate of PMMA as compared to polyimide result in a close to 10-fold reduction in processing time. IR transparent polyethylene, films were replicated by hot embossing of either the polyimide master or a nickel shim electroformed on PMMA. Surface profilometry, optical microscopy and SEM measurements revealed that embossed PE replicas were produced with high fidelity. The angular distribution of IR transmissivity of the PE surface relief has been measured at 10.6 micrometers . Experimental results were compared to those calculated.

Paper Details

Date Published: 6 September 1999
PDF: 9 pages
Proc. SPIE 3739, Optical Fabrication and Testing, (6 September 1999); doi: 10.1117/12.360144
Show Author Affiliations
Patrice A. Topart, CEA-Le Ripault (Canada)
Daniel Plessis, CEA-Le Ripault (France)
Eric Monterrat, CEA-Le Ripault (France)
Pierre Coquard, CEA-Le Ripault (France)
Herve Piombini, CEA-Le Ripault (France)

Published in SPIE Proceedings Vol. 3739:
Optical Fabrication and Testing
Roland Geyl; Jonathan Maxwell, Editor(s)

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