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Proceedings Paper

Realization of fabricating microlens array in mass production
Author(s): Hsiharng Yang; Min-Chieh Chou; Alex Yang; Chuan-Kang Mu; Ruey Fang Shyu
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Paper Abstract

Micro-electro-mechanical system technology offers a wide number of applications for the military, industrial, and consumer markets. The miniaturization of components is a common objective for all studies. Refractive microlens array with density 400 lenses per cm2 are fabricated in three minutes by using hot embossing. The higher accuracy and lower cost of microlens fabrication methods are needed to meet the rapid growth of commercial devices. Higher density of microlens is achievable by a higher density mesh mold. Microlens diameters of 250-380 micrometers are shaped with various molds. Focal lengths of 185-225 micrometers are obtained by changing compression pressure and working temperature which are discovered in this experiment. Molding temperature effects on the surface tension in lens material as explored is essential. From accuracy of microlens arrays are less than Rt 0.1 micrometers that adapt to the form accuracy of the lenses. This article describes a mass fabricating method for microlens array by using hot embossing and the experimental results show its feasibility for practice.

Paper Details

Date Published: 6 September 1999
PDF: 8 pages
Proc. SPIE 3739, Optical Fabrication and Testing, (6 September 1999); doi: 10.1117/12.360143
Show Author Affiliations
Hsiharng Yang, Industrial Technology Research Institute (Taiwan)
Min-Chieh Chou, Industrial Technology Research Institute (Taiwan)
Alex Yang, Industrial Technology Research Institute (Taiwan)
Chuan-Kang Mu, Industrial Technology Research Institute (Taiwan)
Ruey Fang Shyu, National Huwei Institute of Technology (Taiwan)


Published in SPIE Proceedings Vol. 3739:
Optical Fabrication and Testing
Roland Geyl; Jonathan Maxwell, Editor(s)

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