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Proceedings Paper

High-precision cylindrical and quasi-cylindrical aspherization of small surfaces by ion beam figuring
Author(s): Raymond Mercier; Michel Mullot; Michel Lamare; Gerard Tissot
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Paper Abstract

We have used a broad ion beam technique to generate cylindrical structures. Although limited to small dimensions, it produces potentially high precision smooth surfaces. As a first trial, four surfaces were produced for an industrial application, using a fairly simple mask; the 8 mm wide, 3 micrometers deep W profile cylinder was engraved on silicon substrates. Reproducibility was in the range of 1 percent when working in reproducible conditions, allowing refinement of the mask. We shall discuss the limitations of the method and improvement of the mask. We shall discuss a project extending the method to quasi-cylindrical figuring: the fabrication of a diffraction-limited off-axis ellipsoidal mirror at a 21 nm wavelength, with, as a first trial, the fabrication of a toroidal surface to a nanometric precision.

Paper Details

Date Published: 6 September 1999
PDF: 6 pages
Proc. SPIE 3739, Optical Fabrication and Testing, (6 September 1999); doi: 10.1117/12.360139
Show Author Affiliations
Raymond Mercier, Institut d'Optique Theorique et Appliquee (France)
Michel Mullot, Institut d'Optique Theorique et Appliquee (France)
Michel Lamare, Institut d'Optique Theorique et Appliquee (France)
Gerard Tissot, Institut d'Optique Theorique et Appliquee (France)


Published in SPIE Proceedings Vol. 3739:
Optical Fabrication and Testing
Roland Geyl; Jonathan Maxwell, Editor(s)

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