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Proceedings Paper

Properties of films deposited by different discharges in Sb(C2H5)3 vapor
Author(s): Nikolay Glazirin; Konstantin P. Gritsenko
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Paper Abstract

Thin metal-filled polymer films produced by low temperature plasma are used as resistors, protective coatings, catalyzers. Among the others they are used for optical recording media. The possibility to use MOC PECVD for optical recording media production using the Te-based precursors was shown. Sb-based metal-polymer films also attract attention before because Sb is less toxic and more stable, than Te. In this work authors used plasma polymerization with simultaneous Sb evaporation forma boat. In the researches known before the precursor dissociation during PECVD is carried out mainly by low frequency, radio frequency and microwave discharges. Each of these discharges have peculiarities which result on film properties. But all these discharges effect on both dissociation and polymerization processes, which leads to difficulties to obtain films with predetermined properties. It was known before, that the pulsed discharge use for polymerization of organic monomers allows to rule of the ratio between dissociation and polymerization processes, what effects strongly films properties.

Paper Details

Date Published: 7 September 1999
PDF: 4 pages
Proc. SPIE 3738, Advances in Optical Interference Coatings, (7 September 1999); doi: 10.1117/12.360115
Show Author Affiliations
Nikolay Glazirin, Metal-Polymer Institute (Belarus)
Konstantin P. Gritsenko, Metal-Polymer Institute (Belarus)


Published in SPIE Proceedings Vol. 3738:
Advances in Optical Interference Coatings
Claude Amra; H. Angus Macleod, Editor(s)

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