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Proceedings Paper

Electrical and optical properties of indium tin oxide films prepared by pulsed magnetron sputtering
Author(s): Hui-Wen Chou; W. J. Lee; Rung-Ywan Tsai; Yuen Keun Fang; C. C. Chen
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Paper Abstract

Indium tin oxide (ITO) thin films were prepared by unipolar and bipolar dc-pulsed magnetron sputtering in a mixture of argon and oxygen onto the unheated glass substrates. The target of ITO with 10 weight percent tin is used. The influences of polar modes, output frequencies, and on times and off times on the optical, electrical and structural properties of ITO films are investigated. The correlations between the deposition parameters and the film properties are discussed. An optimal condition based on the polar mode and frequency of reactive dc-pulsed sputtering for obtaining the high transmittance and low resistivity of ITO films is suggested.

Paper Details

Date Published: 7 September 1999
PDF: 8 pages
Proc. SPIE 3738, Advances in Optical Interference Coatings, (7 September 1999); doi: 10.1117/12.360113
Show Author Affiliations
Hui-Wen Chou, Industrial Technology Research Institute (Taiwan)
W. J. Lee, National Cheng Kung Univ. (Taiwan)
Rung-Ywan Tsai, Industrial Technology Research Institute (Taiwan)
Yuen Keun Fang, National Cheng Kung Univ. (Taiwan)
C. C. Chen, National Cheng Kung Univ. (Taiwan)

Published in SPIE Proceedings Vol. 3738:
Advances in Optical Interference Coatings
Claude Amra; H. Angus Macleod, Editor(s)

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