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Proceedings Paper

Sensitivity of the ellipsometric angles psi and delta to the surface inhomogeneity
Author(s): Alexander V. Tikhonravov; Michael K. Trubetskov; Enrico Masetti; A. V. Krasilnikova; I. V. Kochikov
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Paper Abstract

Recently a new approximation for the ellipsometer angles of a slightly inhomogeneous thin film was developed. This approximation enables performing a more detailed qualitative analysis of ellipsometric angles than the widely used approximation assuming the linear bulk inhomogeneity. In particular, the new approximation describes not only the impact of inhomogeneity on the ellipsometric angle (Psi) but also its impact on the ellipsometer angle (Delta) . This paper reports specific properties of ellipsometric spectra connected with the surface micro-roughness. In the particular case of fluoride films the ellipsometric angle (Delta) turns to be quite sensitive to this type of inhomogeneity if ellipsometric measurements are performed at high angles of incidence.

Paper Details

Date Published: 7 September 1999
PDF: 10 pages
Proc. SPIE 3738, Advances in Optical Interference Coatings, (7 September 1999); doi: 10.1117/12.360078
Show Author Affiliations
Alexander V. Tikhonravov, Moscow State Univ. (Russia)
Michael K. Trubetskov, Moscow State Univ. (Russia)
Enrico Masetti, ENEA (Italy)
A. V. Krasilnikova, Moscow State Univ. (Russia)
I. V. Kochikov, Moscow State Univ. (Russia)

Published in SPIE Proceedings Vol. 3738:
Advances in Optical Interference Coatings
Claude Amra; H. Angus Macleod, Editor(s)

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