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Proceedings Paper

Misalignment modes in high-performance optical systems
Author(s): Michael R. Descour; Mark R. Willer; Curtis Earl Volin
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Paper Abstract

Misalignment modes are combinations of rigid-body perturbations to the optical elements that comprise an optical system. Comparison of misalignment modes associated with metrology data and projection-camera performance can be used to increase the sensitivity of metrology measurements to specific camera-performance specification such as chief- ray distortion. Selection of measurable misalignment modes in the case of metrology and interesting misalignment modes in the case of camera performance is based on a determination of whether a mode can 'fit' into a projection camera given actuator-stroke and mirror tilt bounds. Measurement and interest subspaces are next compared using distance between subspaces. As an example of this type of analysis, we find that exit-pupil wavefront measurements can be made more sensitive to chief-ray distortion if these measurements are collected at field positions outside the ring field of view of an extreme ultraviolet lithography projection camera.

Paper Details

Date Published: 27 August 1999
PDF: 9 pages
Proc. SPIE 3737, Design and Engineering of Optical Systems II, (27 August 1999); doi: 10.1117/12.360062
Show Author Affiliations
Michael R. Descour, Optical Sciences Ctr./Univ. of Arizona (United States)
Mark R. Willer, Optical Sciences Ctr./Univ. of Arizona (United States)
Curtis Earl Volin, Optical Sciences Ctr./Univ. of Arizona (United States)


Published in SPIE Proceedings Vol. 3737:
Design and Engineering of Optical Systems II
Fritz Merkle, Editor(s)

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