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Proceedings Paper

Characterization of nonplanar motion in MEMS involving scanning laser interferometry
Author(s): Russell A. Lawton; Margaret H. Abraham; Eric Lawrence
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Paper Abstract

A study to evaluate three processes used for the release of standard devices produced by MCNC using the MUMPS process was undertaken by Jet Propulsion Laboratory with the collaboration of The Aerospace Corporation, and Polytec PI. The processes used were developed at various laboratories and are commonly the final step in the production of micro- electro-mechanical systems prior to packaging. It is at this stage of the process when the devices become extremely delicate and are subject to yield losses due to handling errors or the phenomenon of stiction. The effects of post processing with HF on gain boundaries and subsequent thermal processing producing native oxide growth during packaging will require further investigation.

Paper Details

Date Published: 18 August 1999
PDF: 5 pages
Proc. SPIE 3880, MEMS Reliability for Critical and Space Applications, (18 August 1999); doi: 10.1117/12.359370
Show Author Affiliations
Russell A. Lawton, Jet Propulsion Lab. (United States)
Margaret H. Abraham, Jet Propulsion Lab. (United States)
Eric Lawrence, Jet Propulsion Lab. (United States)


Published in SPIE Proceedings Vol. 3880:
MEMS Reliability for Critical and Space Applications
Russell A. Lawton; William M. Miller; Gisela Lin; Rajeshuni Ramesham, Editor(s)

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