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Proceedings Paper

Development of characterization tools for reliability testing of micro-electro-mechanical system actuators
Author(s): Norman F. Smith; William P. Eaton; Danelle M. Tanner; James J. Allen
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Paper Abstract

Characterization tools have been developed to study the performance characteristics and reliability of surface micromachined actuators. These tools include: (1) the ability to electrically stimulate or stress the actuator, (2) the capability to visually inspect the devices in operation, (3) a method for capturing operational information, and (4) a method to extract performance characteristics from the operational information. Additionally, a novel test structure has been developed to measure electrostatic forces developed by a comb drive actuator.

Paper Details

Date Published: 18 August 1999
PDF: 9 pages
Proc. SPIE 3880, MEMS Reliability for Critical and Space Applications, (18 August 1999); doi: 10.1117/12.359365
Show Author Affiliations
Norman F. Smith, Sandia National Labs. (United States)
William P. Eaton, Sandia National Labs. (United States)
Danelle M. Tanner, Sandia National Labs. (United States)
James J. Allen, Sandia National Labs. (United States)


Published in SPIE Proceedings Vol. 3880:
MEMS Reliability for Critical and Space Applications
Russell A. Lawton; William M. Miller; Gisela Lin; Rajeshuni Ramesham, Editor(s)

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