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Proceedings Paper

Reliability of microsystems based on a failure mechanism approach
Author(s): S. Cruzel; Daniel Esteve; Monique Dilhan; Jean-Yves Fourniols; Francis Pressecq; O. Puig; Jean-Jacques Simonne
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Paper Abstract

Compactness, complexity of the interconnections and specific packaging, which are characteristics of Microsystems (MEMS), rule out the use of statistical procedure to assess reliability in space applications. Predictable reliability is the method recommended in this paper that uses a similar approach as CALCE already did for hybrid and microelectronic circuits. This method based on a failure mechanism approach is recalled at first and an example to illustrate this procedure based on the evolution of material crystal properties under radiation is presented.

Paper Details

Date Published: 18 August 1999
PDF: 8 pages
Proc. SPIE 3880, MEMS Reliability for Critical and Space Applications, (18 August 1999); doi: 10.1117/12.359364
Show Author Affiliations
S. Cruzel, CNES (France)
Daniel Esteve, Lab. d'Analyse et d'Architecture des Systemes (France)
Monique Dilhan, Lab. d'Analyse et d'Architecture des Systemes (France)
Jean-Yves Fourniols, Lab. d'Analyse et d'Architecture des Systemes (France)
Francis Pressecq, CNES (France)
O. Puig, CNES (France)
Jean-Jacques Simonne, Lab. d'Analyse et d'Architecture des Systemes (France)


Published in SPIE Proceedings Vol. 3880:
MEMS Reliability for Critical and Space Applications
Russell A. Lawton; William M. Miller; Gisela Lin; Rajeshuni Ramesham, Editor(s)

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