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Proceedings Paper

MEMS reliability, process monitoring, and quality assurance
Author(s): Howard R. Last; Bruce W. Dudley; Robert L. Wood
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Paper Abstract

The reliability of a MEMS-based system depends on the producibility and environmental stability of the MEMS components as well as other components within the system. This article will focus on MEMS components in a sacrificial LIGA MEMS-based Safety & Arming (S&A) system. The process monitoring and quality assurance methods under development for LIGA MEMS S&A components are presented. These methods include techniques to study: (1) process bias, (2) material microstructure and mechanical properties, (3) mechanical response of spring-supported structures, and (4) actuator performance. Characterization of the as-produced components and materials serve as the starting point for future studies of reliability of LIGA MEMS components and systems. The utilization of several process monitoring and quality assurance methods in future reliability studies is discussed.

Paper Details

Date Published: 18 August 1999
PDF: 8 pages
Proc. SPIE 3880, MEMS Reliability for Critical and Space Applications, (18 August 1999); doi: 10.1117/12.359363
Show Author Affiliations
Howard R. Last, Naval Surface Warfare Ctr. (United States)
Bruce W. Dudley, Cronos Integrated Microsystems (United States)
Robert L. Wood, Cronos Integrated Microsystems (United States)


Published in SPIE Proceedings Vol. 3880:
MEMS Reliability for Critical and Space Applications
Russell A. Lawton; William M. Miller; Gisela Lin; Rajeshuni Ramesham, Editor(s)

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